Micro-Gyroscopes with Dynamic Disturbance Rejection

This paper reports a novel micromachined gyroscope design with inherent disturbance-rejection capabilities. The proposed approach is based on increasing the degrees-of-freedom (DOF) of the oscillatory system by the use of two independently oscillating proof masses. Utilizing dynamical ampli cation in the 4-DOF system, inherent disturbance rejection is achieved, providing reduced sensitivity to structural and thermal parameter uctuations and damping changes over the operating time of the device. In the proposed system, the rst mass is forced to oscillate in the drive direction, and the response of the second mass in the orthogonal direction is sensed. The response has two resonant peaks and a at region between peaks. Operation is in the at region, where the gain is insensitive to frequency uctuations. Simulations indicate over 15 times increase in the bandwidth of the system due to the use of the proposed architecture. In addition, the gain in the operation region has low sensitivity to damping changes. Consequently, by utilizing the disturbance-rejection capability of the dynamical system, improved robustness is achieved, which can relax tight fabrication tolerances and packaging requirements and thus result in reducing production cost of micromachined gyroscopes.